NANF213 Thin Films in Nanofabrication
This course will cover thin film deposition and etching practices in nanofabrication. The purpose is to develop a full understanding of the use of, and the processing involved in, thin film materials in nanofabrication. The emphasis is on learning with and using state-of-the-art processing equipment in the Nanofabrication Facility cleanrooms. Offered at the Nanofabrication facility of Pennsylvania State University, main campus.
Prerequisite
Permission of the department
Lecture/Lab Ratio
2:2